| 摘要 |
<p>There is provided a low-cost exposure device of simple configuration capable of correcting a plotting pixel position when performing exposure by respective beams emitted from a device selectively modulating the pixels and performing plotting with a high accuracy. According to data for correction associated with a trajectory of the plotting pixel position corresponding to a scan position of a predetermined plotting pixel required at least for correction and stored in a memory of a control unit, an image to be given to each of the plotting pixel is adjusted and a stage and an exposure head are relatively moved in a state that the respective optical beams emitted from the device selectively modulating the plotting pixels arranged on the exposure head according to the adjusted image data are applied to a member placed on the stage so as to be exposed, thereby performing scan exposure with a predetermined pattern to obtain a predetermined plotting shape.</p> |
