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发明名称
VERFAHREN ZUR MEHRSCHRITTIGEN BEARBEITUNG EINES DÜNNEN UND UNTER DEN BEARBEITUNGSSCHRITTEN BRUCHGEFÄHRDETEN HALBLEITER-WAFERPRODUKTS
摘要
申请公布号
AT385041(T)
申请公布日期
2008.02.15
申请号
AT20010124788T
申请日期
2001.10.17
申请人
INFINEON TECHNOLOGIES AG
发明人
KROENER, FRIEDRICH;SCHMIDT, THOMAS
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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