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发明名称
RINGFÖRMIGE AUFNAHME FÜR EINEN ROTIERENDEN TRÄGER
摘要
申请公布号
AT385611(T)
申请公布日期
2008.02.15
申请号
AT20020018034T
申请日期
2002.08.13
申请人
SEZ AG
发明人
OBWEGER, RAINER
分类号
H01L21/00;H01L21/306;H01L21/304;H01L21/3063;H01L21/68
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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