| 摘要 |
PROBLEM TO BE SOLVED: To provide an aerosol discharge nozzle capable of forming a minute and uniform coating-film stably over a long period of time which can be used even in a small space between a substrate and the nozzle and to provide a coating-film forming device using the nozzle. SOLUTION: The aerosol discharge nozzle 1 having a rectangular discharge opening 1a for discharging aerosol dispersed in particulates into a gas toward the coating-film forming part of the substrate has releasing openings 1c, changing the direction of the particulates passing through both of the longer sides 1b of the discharge opening in the nozzle to a direction not facing toward the coating-film forming part and discharging them, on both ends of the longer sides of the discharge opening 1a. The coating-film forming device is provided with the aerosol discharge nozzle 1. COPYRIGHT: (C)2008,JPO&INPIT
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