| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gradation mask that can control transmittance from 0% to 100% and facilitates pattern formation, and to provide a method for manufacturing the mask. <P>SOLUTION: A light shielding component included in a light shielding layer that forms a light shielding region is carbon black; and the transmittance can be changed by increasing or decreasing the amount of carbon black as the light shielding component. A method for increasing or decreasing the concentration of carbon black as the light shielding component comprises changing the concentration of the carbon black included in the light shielding layer while keeping the same film thickness in different light shielding regions, and thereby, the transmittance is changed. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
