| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter for a biochip that improves the strength and durability of the filter, improves the yield without breaking or damaging the filter also in a manufacturing process, and can reduce the cost, a manufacturing method of the filter for the biochip, and a biochip that uses the filter for the biochip. SOLUTION: The filter for the biochip comprises a filter body, formed of a metal substrate such as silicon constituting a substrate section, a well forming a recessed part disposed in the filter body, and the filter that constitutes the bottom surface of the well and has a plurality of through narrow holes. The filter is made of metal, such as silicon. COPYRIGHT: (C)2008,JPO&INPIT
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