发明名称 |
Method of Forming Metal Thin Film and Metal Wiring Pattern and Method of Manufacturing Display Panel |
摘要 |
A method of forming a metal thin film includes positioning a substrate in a region corresponding to a target, with the target including silver (Ag) and being provided in a reaction space, supplying an inert gas and an oxygen-containing gas into the reaction space. Moreover, the method further includes forming a silver (Ag)-containing conductive film on the substrate by generating plasma between the target and the substrate.
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申请公布号 |
US2008036955(A1) |
申请公布日期 |
2008.02.14 |
申请号 |
US20070682420 |
申请日期 |
2007.03.06 |
申请人 |
KIM TAEK HEE;YUN PIL SANG;KANG HO MIN;JUNG BAE HYOUN |
发明人 |
KIM TAEK HEE;YUN PIL SANG;KANG HO MIN;JUNG BAE HYOUN |
分类号 |
G02F1/1343 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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