发明名称 METHOD FOR FORMING BUMP FOR ELECTRIC CONNECTION
摘要 PROBLEM TO BE SOLVED: To stabilize a connection of a microscopic bump for electric connection to reduce its manufacturing cost. SOLUTION: A method for forming the bump for electric connection comprises the steps of forming a plurality of bump original forms on a substrate, depositing a protective film with an upper part of the bump original forms exposed, and acuminating the bump original forms by ion trimming corners of the uppper part of the plurality of bump original forms exposed from the protective film. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008034562(A) 申请公布日期 2008.02.14
申请号 JP20060205278 申请日期 2006.07.27
申请人 YAMAHA CORP 发明人 SUGIURA MASAHIRO
分类号 H01L21/60 主分类号 H01L21/60
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