| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a liquid crystal display element capable of suppressing deposition of impurities on an alignment layer or changes with time and further improving the display quality and the yield of product. SOLUTION: The manufacturing apparatus of a liquid crystal display element having a liquid crystal LC sealed by forming an alignment layer 14 on the surface of a pixel electrode substrate 4 having a display area 12, forming an alignment layer 18 on the surface of a transparent electrode substrate 6 having a transparent electrode 16, and bonding both substrates with a sealing adhesive 20, is equipped with: a conveyance chamber 42 that can selectively give a vacuum environment or an atmospheric environment and has a conveying robot 54 inside; a film forming chamber 46 for forming the alignment layer on each surface of the pixel electrode substrate and the transparent electrode substrate in vacuum; a sealing adhesive/liquid crystal processing chamber 48 for applying the sealing adhesive on the pixel electrode substrate or the transparent electrode substrate with the alignment layer formed and dropping the liquid crystal onto an area surrounded by the sealing adhesive; and a laminating chamber 50 for laminating the substrates in vacuum. COPYRIGHT: (C)2008,JPO&INPIT
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