| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-range non-contact probe which performs a function for measuring approximate distance, in addition to a measuring function which uses accurate structured light. SOLUTION: The probe matches a probe control interface which enables advanced measuring ability and function and is used with a probe head system which provides a limited number of cable connections. A laser beam of the probe is guided along a first optical path for a first period in order to provide a measuring function which uses a structured light, and guided along a second optical path for a second period in order to provide a distance measuring function. A single beam modulation element having at least a first part and a second part which are different types in optical properties is actuated, outputs the laser beam from the first part along the first optical path, and then outputs the laser beam from the second part along the second optical path. COPYRIGHT: (C)2008,JPO&INPIT
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