| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette capable of conducting a dressing and an inspection by a single manipulation. SOLUTION: A dress cassette is equipped with a cassette body having a dress board mounting unit with the dress board mounted in a horizontal posture. The cassette body comprises an inspection wafer mounting unit with the inspection wafer mounted in the horizontal pusture, and the dress board and the inspection wafer can be taken out and put in from the front of the inspection wafer mounting unit. COPYRIGHT: (C)2008,JPO&INPIT |
