| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign material detector that can detect a minute foreign material on both the front and the rear surfaces of a detection object and has high accuracy of detection. SOLUTION: This foreign material detector sets, as a detection area F to which image analysis is to be applied, a first detection area F1 overlapping a light-received image Z from the longitudinal direction, and a second detection area F2 overlapping the light-received image Z from the lateral direction. Thus, even if a minute foreign material exists, on either the front or the rear surfaces of a glass substrate W, this can be detected accurately. COPYRIGHT: (C)2008,JPO&INPIT |
