| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an oxide porous body utilizable as functional material that can be used for light emitting devices, optical devices and microdevices. SOLUTION: The method of manufacturing an oxide porous body comprises: a step where a substrate is prepared; a step where a film composed so as to contain a pillar-shaped structural body dispersedly arranged on the substrate and a region surrounding the columnar structural body is formed by a non-equilibrium process; and a step where, while the pillar-shaped structural body is removed from the film by wet etching, simultaneously, the region is subjected to oxidation treatment, so as to form an oxide porous body. The pillar-shaped structural body is polycrystal aluminum, the region is composed of an amorphous material selected from Si, Ge and Si<SB>X</SB>Ge<SB>1-x</SB>(0<x<1), and also, the film is formed in such a manner that the amorphous material is comprised in the ratio of 30 to 60 atomic%. COPYRIGHT: (C)2008,JPO&INPIT
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