| 摘要 |
PROBLEM TO BE SOLVED: To efficiently remove an unnecessary coating film on the edge part of a mask substrate with the coating film formed on the surface. SOLUTION: A coating film removing part 4 is moved from one end to the other end of the substrate G along the edge of the substrate G, for example 5 times while a solvent is discharged on a place at a first distance, for example 1 mm, inside from the edge of the substrate G by the coating film removing part 4 (a first removing step), then in a similar way to the first removing step, the coating film removing part 4 is moved along the edge of the substrate, for example 3 times while the solvent is discharged on a place at a second distance, for example 0.8 mm, which is shorter than the first distance, inside from the edge of the substrate G by the coating film removing part 4 (a second removing part). The coating film on the edge part is efficiently removed in this way and total treating time is reduced because a linear film formed on the substrate surface of the edge part in the first removing step is removed in the second removing step. COPYRIGHT: (C)2008,JPO&INPIT
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