| 发明名称 |
PROBE CARD ASSEMBLY AND KIT, AND METHOD OF USING THEM |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method to enable the tip of a probe element to be oriented without changing the position of a probe card. <P>SOLUTION: A probe card assembly 500 comprises a probe card 502 and a space converter 506. The space converter 506 is equipped with the probe element 524. An interposer 504 is interposed in between the space converter 506 and the probe card 502. The space converter 506 and the interposer 504 are stacked up. The orientation of the space converter 506 is adjusted by an actuator. Thus, the probe elements 524 can be arranged so as to optimize probing of the wafer 508 as a whole. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008034861(A) |
申请公布日期 |
2008.02.14 |
| 申请号 |
JP20070216518 |
申请日期 |
2007.08.22 |
| 申请人 |
FORMFACTOR INC |
发明人 |
KHANDROS IGOR Y;MATHIEU GAETAN L;ELDRIDGE BENJAMIN N;GRUBE GARY W |
| 分类号 |
G01R1/073;H01L21/66;B23K1/00;B23K20/00;B23K31/02;C23C18/16;C25D5/08;C25D5/16;C25D5/22;C25D7/12;C25D21/02;G01R1/04;G01R1/06;G01R1/067;G01R31/26;G01R31/28;H01L21/00;H01L21/48;H01L21/56;H01L21/58;H01L21/60;H01L21/603;H01L21/607;H01L21/68;H01L23/02;H01L23/12;H01L23/32;H01L23/48;H01L23/485;H01L23/49;H01L23/498;H01L23/538;H01L25/065;H01L25/07;H01L25/16;H01L25/18;H01R9/00;H01R12/71;H01R13/05;H01R13/24;H01R29/00;H01R33/74;H01R33/76;H01R107/00;H05H1/18;H05K1/14;H05K1/18;H05K3/20;H05K3/24;H05K3/30;H05K3/32;H05K3/34;H05K3/36;H05K3/40;H05K7/10 |
主分类号 |
G01R1/073 |
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