| 摘要 |
PROBLEM TO BE SOLVED: To provide an induction-type displacement detection device improved in resolution. SOLUTION: The device is such that the length of one receiving loop along a measurement axis isλ/2, and the pitch of a flux-coupling member isλ/N (N is three or larger odd number), and the one receiving loop comprises a pair of opposite parts which are opposite to each other and parallel to the measurement axis; a pair of tilt parts, having tilt portions bending from both ends of the pair of parallel parts toward the center of the measurement axis of the receiving loop with respect to the measurement axis, and a pair of projecting parts which are positioned at centers of the parallel parts and made up in a symmetrical shape along the measurement axis with respect to the centers; and the distance between centers of the portions of the projecting parts tilted to the measurement axis is approximatelyλ/2N (N an odd number of 3 or larger), whereinλis the length of the portion of the pair loop which has adjacent receiving loops, along the measurement axis. COPYRIGHT: (C)2008,JPO&INPIT
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