| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of attaining displacement control of a movable electrode of a vibration plate or others. SOLUTION: In a drive control method driving the vibration plate 22 by generating electrostatic force based on the voltage between an individual electrode 12 and the vibration plate 22 in an electrostatic actuator of a liquid droplet actuator or others equipped with an individual electrode 12 being a fixed electrode and the vibration plate 22 being the movable electrode supported facing the individual electrode 12 spaced apart by a predetermined distance and operating by the electrostatic force generated based on the potential difference generated between the same and the fixed electrode, the drive control circuit 40 controls the displacement of the vibration plate 22 going away from the individual electrode 12 by applying the voltage corresponding to the displacement of the vibration plate 22 to the vibration plate 22 attracted to the individual electrode 12 by the electrostatic force after lowering the applying voltage once, in order to space apart the vibration plate 22 from the individual electrode 12 by the restoring force acting on the supported vibration plate 22. COPYRIGHT: (C)2008,JPO&INPIT
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