METHOD FOR PRODUCING AT LEAST ONE MULTILAYER BODY, AND MULTILAYER BODY

摘要

The invention relates to a method for producing a multilayer body, wherein the multilayer body comprises at least two functional layers on a top side of a carrier substrate, which are patterned in register with one another by preparing an underside of the carrier substrate in such a way that in a first region there results a transmissivity for a first exposure radiation and in at least one second region there results a transmissivity for at least one second exposure radiation, different from said first exposure radiation, in register with the first region, that the underside is successively exposed with the first and the at least one second exposure radiation, and that the first exposure radiation is used for patterning a first functional layer and the at least one second exposure radiation is used for patterning at least one second functional layer on the top side of the carrier substrate.