HYDROGEN GAS CONCENTRATION SENSOR AND APPARATUS FOR DETERMINING HYDROGEN GAS CONCENTRATION

摘要

A hydrogen gas concentration sensor which comprises a base and hydrogen-d etecting films which are adjacent to one another and formed on the base. The se hydrogen-detecting films each comprises a thin film layer and a catalyst layer formed on the surface of the thin film layer. Upon contact with hydrog en gas, each catalyst layer reversibly hydrogenates the thin film based on p hotocatalysis to reversibly change the electrical resistance thereof. These thin film layers differ in resistance change sensitivity to hydrogen gas con centration changes and in hydrogen gas concentration determination range. Th us, the hydrogen gas concentration sensor determines the concentration of hy drogen gas with a thin film layer having a higher sensitivity when the hydro gen gas concentration is low and with a thin film layer having a wider deter mination range when the hydrogen gas concentration is high.