| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when an external connecting electrode and an element connecting electrode pad are fixed by a conductive adhesive, it is necessary to solidify the conductive adhesive but after solidification, the hardness becomes high and the area to be coated is comparatively wide so that vibrations of a piezoelectric vibrator are suppressed and vibration characteristics may be made worse. SOLUTION: In the manufacturing method of the piezoelectric device, a substrate connecting electrode formed on the piezoelectric vibrator and the element connecting electrode pad formed on an insulated substrate are electrically and mechanically connected and fixed to each other with at least one piece of nickel pillar. COPYRIGHT: (C)2008,JPO&INPIT
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