| 摘要 |
PROBLEM TO BE SOLVED: To provide a circuit pattern inspecting device using high-reliability electron beams, capable of selectively controlling the charged condition of a board to be inspected. SOLUTION: The circuit pattern inspecting device emits electron beams to the surface of the board, having a plurality of chips on which a circuit pattern is formed, detects signals generated from the board with emission to form it into an image, and compares the image with another image to detect the defects on the circuit pattern. The image to be inspected is acquired by inspection scans that is one movement of the board, which is moved in one direction while being scanned with the electron beams for emitting the electron beams to a chip train in a line, and then a charged condition, in the region to which the electron beams are to be emitted with the inspecting scan, is made into a saturated condition or the charged condition is restored into original condition so as to uniformize the quality of the image. To this purpose, a condition setting means is provided for setting the electro-optical conditions of post scans, with which electron beams are emitted to the emitted region again. COPYRIGHT: (C)2008,JPO&INPIT
|
