SETTING METHOD OF INSPECTION REFERENCE DATA FOR VISUAL EXAMINATION OF SUBSTRATE AND VISUAL EXAMINATION DEVICE OF SUBSTRATE USING IT

摘要

PROBLEM TO BE SOLVED: To sharply reduce the load of a user required in the setting work of inspection reference data. SOLUTION: A set screen containing the display region 61 or operation receiving region 63 of the image cut out of the image of a good product model at every part to be set of the inspection reference data is displayed to receive selective operation. A box for inputting the part to be set or the data related to the appearance of the periphery thereof is contained in an input box 64 made effective in the operation receiving region 63. When the call button 65 corresponding to the input box 64 of the appearance data is clicked, a pull-down menu due to the choices based on the appearance data registered in an inspection reference data base is displayed. When the user completes the selection of the choices, the inspection reference data fitted to the selected appearance data is read from the inspection reference data base. COPYRIGHT: (C)2008,JPO&INPIT