发明名称 Variable shape mirror
摘要 A variable shape mirror includes a support substrate, a mirror substrate that is opposed to the support substrate, a fixing member that is disposed on the support substrate and fixes the mirror substrate, and a piezoelectric element that is disposed on the support substrate and is expanded or contracted so as to deform a reflection plane of the mirror substrate. A bonding layer for bonding the mirror substrate and the fixing member to each other is provided to the surface of the mirror substrate opposite to the surface on which the reflection plane is formed, and the bonding layer is formed in an area that corresponds to the outside of an incident area of a light beam that enters the reflection plane.
申请公布号 US2008037148(A1) 申请公布日期 2008.02.14
申请号 US20070889046 申请日期 2007.08.08
申请人 THE RITSUMEIKAN TRUST 发明人 TANAKA FUMINORI;TANAKA KATSUHIKO;ISHII AKIRA;SUGIYAMA SUSUMU
分类号 G02B7/185;G02B5/08 主分类号 G02B7/185
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