| 摘要 |
There is provided a piezoelectric pump including a piezoelectric vibrator formed by stacking a piezoelectric body on at least one of the front and rear surfaces of a shim made of a conductive metal thin plate, and a housing that makes the peripheral edge of the piezoelectric vibrator liquid-tight to form a pump chamber. An alternating current is applied to between the shim of the piezoelectric vibrator, and the piezoelectric body to vibrate the piezoelectric vibrator, thereby generating a pumping action. A cylindrical bent part is formed at a peripheral edge of the shim of the piezoelectric vibrator, and a liquid-tight seal member is interposed between the cylindrical bent part and the housing. As a result, the piezoelectric pump with a highly-reliable fluid-tight structure around the piezoelectric vibrator is obtained.
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