发明名称 |
LIGHT MODULATORS COMPRISING SI-GE QUANTUM WELL LAYERS |
摘要 |
<p>Optical modulators include active quantum well structures (200) coherent with pseudosubstrates (100) comprising relaxed buffer layers (104, 106, 108, 110) on a silicon substrate (102). In a preferred method the active structures, consisting of Si1-x Gex barrier and well layers with different Ge contents x, are chosen in order to be strain compensated. The Ge content in the active structures may vary in a step-wise fashion along the growth direction or in the form of parabolas within the quantum well regions. Optical modulation may be achieved by a plurality of physical effects, such as the Quantum Confined or Optical Stark Effect, the Franz-Keldysh Effect, exciton quenching by hole injection, phase space filling or temperature modulation. In a preferred method the modulator structures are grown epitaxially by low-energy plasma-enhanced chemical vapor deposition (LEPCVD).</p> |
申请公布号 |
WO2008017457(A1) |
申请公布日期 |
2008.02.14 |
申请号 |
WO2007EP06974 |
申请日期 |
2007.08.07 |
申请人 |
PAUL SCHERRER INSTITUT;POLITECNICO DI MILANO;CHRASTINA, DANIEL;SIGG, HANS-CHRISTEN;SOICHIRO, TSUJINO;VON KAENEL, HANS |
发明人 |
CHRASTINA, DANIEL;SIGG, HANS-CHRISTEN;SOICHIRO, TSUJINO;VON KAENEL, HANS |
分类号 |
G02F1/017;H01L21/205 |
主分类号 |
G02F1/017 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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