| 发明名称 |
LANTHANOID-CONTAINING OXIDE TARGET |
| 摘要 |
<p>Provided is an oxide target which includes indium (In) and an element (A) selected from among a group A stated below. The oxide target is characterized in including an oxide expressed as AInO<SUB>3</SUB>. Group A: lanthanum (La), neodymium (Nd), ytterbium (Yb), erbium (Er) and dysprosium (Dy).</p> |
| 申请公布号 |
WO2008018403(A1) |
申请公布日期 |
2008.02.14 |
| 申请号 |
WO2007JP65346 |
申请日期 |
2007.08.06 |
| 申请人 |
IDEMITSU KOSAN CO., LTD.;INOUE, KAZUYOSHI;TANAKA, NOBUO |
发明人 |
INOUE, KAZUYOSHI;TANAKA, NOBUO |
| 分类号 |
C23C14/34;C04B35/00;C04B35/50 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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