| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect correcting device capable of efficiently correcting defect while lightening the burden on an operator. SOLUTION: Prior to correction of defect, a stage 2 moves a substrate 1 two-dimensionally to a position where the defect are put in the visual field area of an objective 14. A camera 5 generates an image signal based upon incident light and outputs it to a controller 6. An image processing section 62 generates thumbnail image data based upon a review inspection image signal. A main controller 65 relates thumbnail image data of a review inspection image to defect data and stores the thumbnail image data into a storage section 66. When an instruction to start correction is sent, the main controller 65 reads thumbnail image data of all defect to be reviewed from the storage section 66 and outputs them to a display 7. The display 7 displays thumbnail images formed by reducing review inspection images of the respective defect based upon the thumbnail image data. Defect selected by the operator having confirmed display of the review inspection images is irradiated with laser beam. COPYRIGHT: (C)2008,JPO&INPIT
|
