摘要 |
The invention relates to a microelectronic device with an array (10) of field electrodes (11) that are individually addressable and can for example generate dielectrophoretic forces on particles (2) above the array (10). In a preferred embodiment, the field electrodes (11) can selectively be put to one of two phase-inverted potentials (+, -) or a floating potential (Z). Various space saving circuits are described that allow the operation of the field electrodes (11) with a minimal number of components. |