发明名称 SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>A channel layer (40) for forming a part of the carrier path between a source electrode (100) and a drain electrode (110) is formed on a drift layer (30). The channel layer (40) is composed of Ge granular crystals formed on the drift layer (30), and a cap layer covering the Ge granular crystals.</p>
申请公布号 WO2008018432(A1) 申请公布日期 2008.02.14
申请号 WO2007JP65403 申请日期 2007.08.07
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA;JAPAN FINE CERAMICS CENTER;SEKI, AKINORI;TANI, YUKARI;SHIBATA, NORIYOSHI 发明人 SEKI, AKINORI;TANI, YUKARI;SHIBATA, NORIYOSHI
分类号 H01L29/12;H01L21/336;H01L29/78 主分类号 H01L29/12
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