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发明名称
Bauteil aus synthetischem Quarzglas zur Anwendung in der ArF-Excimerlaser-Lithographie
摘要
申请公布号
DE60035142(T2)
申请公布日期
2008.02.14
申请号
DE20006035142T
申请日期
2000.03.06
申请人
HERAEUS QUARZGLAS GMBH & CO. KG;SHIN-ETSU QUARTZ PRODUCTS CO. LTD.
发明人
FUJINOKI, AKIRA;OSHIMA, TAKAYUKI;NISHIMURA, HIROYUKI;YAGINUMA, YASUYUKI
分类号
C03C3/06;H01L21/027;C03B19/14;C03B20/00;C03C4/00;C03C23/00;G02B1/00;G03F7/20
主分类号
C03C3/06
代理机构
代理人
主权项
地址
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