| 摘要 |
<P>PROBLEM TO BE SOLVED: To maintain a state in which the pressure of a projection optical system space is higher compared to its surrounding space, and to prevent oscillation produced by a mechanism for supplying a gas into the equipment from being transmitted to the projection optical system. <P>SOLUTION: A bulkhead 3 is prepared within a chamber 1 that forms a projection optical system space S. A gas supply pipeline 11 is prepared through the chamber 1 and the bulkhead 3 from outside, and this gas supply pipeline 11 is connected to a gas adjustment mechanism 12 outside the chamber 1. The bulkhead 3 is provided with a hole, through which the gas supply pipeline 11 is installed by using a sealing material 13. <P>COPYRIGHT: (C)2008,JPO&INPIT |
