发明名称 Method of manufacturing image sensor
摘要 Provided is a method of manufacturing an image sensor which may include forming a plurality of photoelectric converters on a semiconductor substrate, forming a silicon nitride (SiN) film on the plurality of photoelectric converters, supplying plasma gas including hydrogen to the SiN film, and performing a heat treatment on the semiconductor substrate.
申请公布号 US2008038865(A1) 申请公布日期 2008.02.14
申请号 US20070878829 申请日期 2007.07.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KWON DOO-WON
分类号 H01L21/02 主分类号 H01L21/02
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