| 摘要 |
A carrier tray for use with a prober is arranged to allow the prober to measure or test not only semiconductor wafers but also semiconductor packages and accurately position each of different-shaped semiconductor packages. A carrier tray 1 includes a lowermost tray 10 and an uppermost tray 20 interposing therebetween an intermediate tray 30 . The lowermost and uppermost trays 10 and 20 are each of a circular shape having a diameter D 1 . A diameter D 3 of the intermediate tray 30 is smaller than the diameter D 1 . The intermediate tray 30 is centrally formed with a screw hole portion 32 in which a locking spacer screw 22 is screwed. A semiconductor package 40 is to be placed in a package holding pocket 11 . With the locking spacer screw 22 , the intermediate 30 is slidable in an X and Y directions, so that the X and Y coordinates of the semiconductor package 40 are determined uniquely relative to the carrier tray 1.
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