发明名称 METHOD FOR PRODUCING ELECTRONIC COMPONENTS AND PRESSURE SENSOR
摘要 The method serves for producing electronic components in particular electronic sensors for pressure and differential pressure measurement. Firstly, the semiconductor structure of the electronic components is produced on a wafer. An insulating oxide layer is then applied. A protective metal layer (6) is subsequently applied, the metal layer (6) being applied in sections only in those regions of the wafer in which no splitting, for example by mechanical separation, is effected later. The electronic components thus formed in the wafer are then divided up into individual elements.
申请公布号 WO2007093279(A3) 申请公布日期 2008.02.14
申请号 WO2007EP00780 申请日期 2007.01.30
申请人 GRUNDFOS MANAGEMENT A/S;KROG, JENS PETER;ERIKSEN, GERT FRIIS;DYRBYE, KARSTEN 发明人 KROG, JENS PETER;ERIKSEN, GERT FRIIS;DYRBYE, KARSTEN
分类号 G01L9/06 主分类号 G01L9/06
代理机构 代理人
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