| 摘要 |
An apparatus and a method for generating ozone water are provided to generate high concentration ozone water, and an apparatus and a method for generating ozone water are provided to improve the process yield of a substrate treatment process. An apparatus for generating ozone water comprises: a mixing vessel(110) for receiving deionized water and ozone gas, and mixing the deionized water and the ozone gas to generate ozone water; a circulation line(140) for circulating ozone water in the mixing vessel; and a gas-liquid separator(160) installed on the circulation line to separate, incompletely dissolved gas in the ozone water circulated along the circulation line, from the ozone water. The gas-liquid separator includes a housing in which the ozone water is housed, wherein the housing is provided with an inlet for flowing in the ozone water, an outlet for flowing out the incompletely dissolved gas separated from the ozone water that has flown in, and an ozone water discharge port for discharging ozone water from which the incompletely dissolved gas has been separated. The apparatus further comprises a buffer vessel(120) for receiving the ozone water from the gas-liquid separator to store the ozone water, and an ozone water supply line(150) for supplying the ozone water from the buffer vessel to a substrate treatment part for performing a process of cleaning alien substances on a surface of a substrate(W). |
