| 摘要 |
A substrate adsorption device 1 includes: a stage 11 having an adsorption face 12 for holding a substrate 20 ; a plurality of adsorption ports 13 formed in a region of the adsorption face 12 of the stage 11 ; and a vacuum pump 14 connected to each adsorption port through an air discharge path 17 . A pressure sensor 18 for detecting the pressure in the air discharge path 17 is provided, and a plurality of leak trenches 30 open to both the adsorption face 12 of the stage 11 and a side face of the stage 11 are formed in a region of the stage 11 except the region where the adsorption ports 13 are formed. With such a low-cost and simple structure, a foreign matter 15 , which is a factor of inviting damage to the substrate 20 , is detected, to prevent damage to the substrate 20. |
