| 摘要 |
PROBLEM TO BE SOLVED: To provide an alarm device capable of automatically detecting the faults of a factory on the basis of the inspection results of products. SOLUTION: The alarm device 1 is a device for detecting the occurrence of faults in a factory 102. The factory 102 is provided with: a plurality of manufacturing apparatuses 103 manufacturing products by treating substrates; and an inspection device 104. The alarm device 1 totals the occurrence levels of defects for each monitor unit region of a predetermined size that is set for each type of faults on the basis of the inspection results of the surface of the substrate in the middle of manufacturing the products and compares the occurrence level of the defect in each monitor unit region with the reference. The alarm device transmits an alarm at the time when the monitor unit region with the occurrence level of the defect higher than the reference is detected, and outputs the total results. COPYRIGHT: (C)2008,JPO&INPIT
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