| 摘要 |
A vacuum processing apparatus, a method for diagnosing an electrostatic chuck, and a recording medium storing a program for performing the method are provided to diagnose the insulation state of a dielectric layer accurately before using the electrostatic chuck in vacuum treatment of a substrate. An electrostatic chuck(22) is adapted to suck and hold a glass substrate(G). A high voltage DC power source(67) applies a diagnosis voltage, which is lower than a voltage when the glass substrate is sucked, to a chuck electrode(24) of the electrostatic chuck. Respective measuring units(70,71) obtain measurement data of electric properties at measurement positions of the electrostatic chuck. A controller(80), functioning as a diagnosing part, compares the measurement data with predetermined set data to diagnose whether the electrostatic chuck is usable. |
