APPARATUS AND METHOD FOR CHARACTERIZING DEFECTS IN A TRANSPARENT SUBSTRATE
摘要
An apparatus (10) and method for detecting defects in a transparent substrate (12) by simultaneously using a combination of bright field and dark field light sources for illuminating the substrate. The apparatus is capable of detecting both inclusions and surface defects simultaneously while the substrate is in motion, simplifying the characterization of substrates in a manufacturing setting.
申请公布号
WO2007133581(A3)
申请公布日期
2008.02.14
申请号
WO2007US11178
申请日期
2007.05.09
申请人
CORNING INCORPORATED;LEBLANC, PHILIP R;SCHNEIDER, VITOR M;USTANIK, CORREY R
发明人
LEBLANC, PHILIP R;SCHNEIDER, VITOR M;USTANIK, CORREY R