| 摘要 |
PROBLEM TO BE SOLVED: To provide a developing nozzle which hardly causes clogging of the developing nozzle even without switching a pore size of a filtration filter F disposed in a supply circulation mechanism for a developing liquid into a finer pore size. SOLUTION: The developing nozzle is at least provided with: (A) a hollow adaptor 80 comprising an upper port on the upper part, a lower port on the lower port, a vertical hollow part 81 which is penetrated from the upper port to the lower port and is constituted with an upper half hollow part 81A and a lower half hollow part 81B functioning as a trap, a bent hollow part 82 branched from the vertical hollow part, and a bent lower port at the lower part of the bent hollow part; (B) a strainer 83 in the bent hollow part; (C) a developing nozzle tip part 84 of the bent lower port; and (D) an opening/closing valve 85 and a waste liquid pipe 86 connected to the lower port. COPYRIGHT: (C)2008,JPO&INPIT |
