| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface processing apparatus and a surface processing method for easily processing a surface of a workpiece to form a mirror surface. SOLUTION: The surface processing apparatus 100 for processing the surface of the workpiece B composed of a piezoelectric material is provided with a cylindrical body 10 made of a conductive material for accommodating liquid L, abrasive grains S composed of cerium oxide, media M and the workpiece B; a rod-shaped shaft body 20 of the conductive material arranged in the longitudinal direction on a center axial line C1 of the cylindrical body 10; an insulation member 0 provided between the cylindrical body 10 and the shaft body 20; a power source 40 connected to the cylindrical body 10 and the shaft body 20 to apply voltage to an inner peripheral surface 13 of the cylindrical body 10 as a positive electrode and an outer peripheral surface 21 of the shaft body 20 as a negative electrode; and a power means 50 for rotating the cylindrical body 10 around the center axial line as a rotation axis. When a center axial line C2 of the shaft body 20 is horizontal, the cylindrical body 10 is rotated by the power means 50 to process the surface of the workpiece B in a state that the inner peripheral surface 13 of the cylindrical body 10 is coated with the abrasive grains S by electrophoretic migration. COPYRIGHT: (C)2008,JPO&INPIT |
