| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems that it has been very difficult to selectively detect only planar anomalies by a surface inspection device of an inspection type based on reflectance and transmittance when appearance defects due to planar anomalies such as protrusions, dents, and fractures on a plane are to be inspected at high speed and that it has been impossible to inspect appearance defects by a detection method by measuring irregularities through the use of a laser beam since resolution is not sufficient. SOLUTION: An optical scanning type plane visual inspection apparatus comprises an optical scanning means for linearly scanning the plane with light emergent from a light source; a reflected light position detecting means for receiving reflected light of the scanning light from the plane and planar anomalous parts; and an angle inspecting and measuring part for inspecting planar anomalies by computing angles of the planar anomalous parts on the basis of detection signals from the detecting means. The reflected light position detecting means is separated in the direction of an optical axis by a prescribed distance from an image-forming position of an image-forming lens. COPYRIGHT: (C)2008,JPO&INPIT
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