发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device includes a first MIS transistor and a second MIS transistor. The first MIS transistor includes: a first gate insulating film formed on a first active region of a substrate; and a first gate electrode formed on the first gate insulating film. The second MIS transistor includes: a second gate insulating film formed on a second active region of the substrate and having a dielectric constant lower than the first gate insulating film; and a second gate electrode formed on the second gate insulating film. Insulting sidewall spacers having the same structure are formed on respective side faces of the first gate electrode and the second gate electrode.
申请公布号 US2008036008(A1) 申请公布日期 2008.02.14
申请号 US20070882499 申请日期 2007.08.02
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 HIRASE JUNJI;SATO YOSHIHIRO
分类号 H01L29/78;H01L21/8238 主分类号 H01L29/78
代理机构 代理人
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