FABRICATION PROCESS CONTROL SYSTEM EMULATOR

摘要

An emulator is provided that may simulate both software and hardware functions of a fabrication process control system. In a first embodiment, the emulator includes (1) a graphical user interface (GUI) emulator portion adapted to emulate a GUI of a fabrication process control system; (2) a central processing unit (CPU) emulator portion adapted to communicate with the GUI emulator portion and adapted to emulate a CPU of the fabrication process control system; and (3) a harware emulator portion adapted to communicate with the GUI emulator portion and with the CPU emulator portion, and adapted to emulate at least one hardware device employed by the fabrication process control system. Other embodiments also are provided.