LINEAR EVAPORATOR FOR VAPOR DEPOSITION OF VERTICAL THIN FILM

摘要

A linear vapor deposition source for vapor deposition of a vertical substrate is provided to prevent clogging of an opening by maintaining the temperature of a crucible and the opening of a dot vapor deposition source similarly. A linear vapor deposition source for vapor deposition of a vertical substrate(10) is composed of the predetermined number of dot vapor deposition sources(100). The dot vapor deposition source comprises a crucible(31) and a heating part. An upper part of the crucible is open, and a vapor deposition material(20) is put into the inner part of the crucible. The heating part heats the crucible. The dot vapor deposition sources are arranged to make a spreading distance of the vapor deposition material different respectively.