| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck which has high surface smoothness, is capable of restraining particles from occurring, equipped with an outstanding attraction/detachment performance, and formed of silica glass material. <P>SOLUTION: The electrostatic chuck has a configuration that it is composed of a tabular base material 1 formed of silica glass, a dielectric layer 2 of silica glass material which has a volume resistivity of 10<SP>8</SP>to 10<SP>12</SP>Ωcm and an additive of 0.1 to 30% of, at least, an element selected from three elements, TiO<SB>2</SB>, SnO<SB>2</SB>, and ZnO, and a metal electrode 3 which is embedded between the material 1 and the layer 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
