| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspecting device and method capable of reducing a lead time of manufacturing process. <P>SOLUTION: A controlling part 14 generates defect information which identifies a defect on a substrate during inspection of a substrate installed. After an inspection is performed, the controlling part 14 compares defect information generated during inspection with defect information generated during inspection of un underlying layer of the substrate so that the underlying layer generates target defect information which identifies a defect occurred on the uppermost layer except an overlapping defect which overlaps the defect. A determining part 13 compares target defect information of the uppermost layer N output from a data calculating part and determines where to carry out the substrate thereby notifying the controlling part 14. <P>COPYRIGHT: (C)2008,JPO&INPIT |
