| 摘要 |
PROBLEM TO BE SOLVED: To provide an active matrix liquid crystal display integrating the peripheral drive circuit and balanced as a whole in which thin film transistors having different characteristics can be integrated on the same substrate without increasing the process. SOLUTION: Since a Ta film of high heat resistance or a film principally comprising Ta is employed as a wiring material and covered with a protective layer, heat treatment can be carried out at high temperature (400-700°C). When the protective layer is used as an etching stopper, a TFT having an LDD structure by self-aligned process using a sidewall 126 is arranged in a peripheral drive circuit, and a TFT having an LDD structure by nonself-aligned process using an insulator 125 is arranged in a pixel matrix section. COPYRIGHT: (C)2008,JPO&INPIT |
