METHOD OF FORMING MULTILAYER STRUCTURE, AND METHOD OF MANUFACTURING WIRING SUBSTRATE AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To form a structurally stable multilayer structure using a droplet dispenser. SOLUTION: The method of forming the multilayer structure includes a step of forming a first insulation layer, a conductive layer disposed on the first insulation layer, and a second insulation layer covering the first insulation layer and the conductive layer by heating at a time a first insulation material layer, a second insulation material layer, and a conductive material layer formed using the droplet dispenser. COPYRIGHT: (C)2008,JPO&INPIT