| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning machine that can effectively remove a substance depositing on a cassette and causing foreign matter of a display device, and to provide a method for manufacturing a display device by which the number of foreign matter depositing on a display panel can be decreased in a cleaning step of a display panel to improve the yield. SOLUTION: The cleaning machine 11 comprises: a cleaning section 13 cleaning a cassette 12; an air flow passage 18 having one end connected to the lower part of the cleaning section 13 and the other end connected to the upper part of the cleaning section 13; a blower unit 19 circulating air in the cleaning machine 11 between the cleaning section 13 and the air flow passage 18; a HEPA (high efficiency particulate air) filter 20 disposed in the downstream side of air in the air flow passage 18; an air blowing port 16 provided in the upper part of the cleaning section 13; a nozzle 17 provided in the upper part of the cleaning section 13; and an air sucking port provided in the lower part of the cleaning section 13. COPYRIGHT: (C)2008,JPO&INPIT
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